Full-auto Pellicle Mounter (KAM-201)

Features

• Available for both EUV and OPT pellicle mounting
• Ultra-clean 6-axis robot can automatically transfer Reticle and Pellicle with automatic fork changing system
• Ensure mounting accuracy by image alignment compensation and active parallelism adjustment mechanism on mounting station
• Automatic measurement function for mounting accuracy
• AOI inspection for pellicle surface defects
• Compliant with AMHS automatic load and unload

Performance

• Optical distortion after mounting
  
  <2nm
• Mounting accuracy
  
  ±0.1mm
• Mounting force
  
  0.035～0.4 kN
• Cleanliness
  
  0 count at particle >100nm

Reticle Pod Exchanger (KAX-311)

Features

• Available for varieties of Reticle SMIF Pod (RSP150/200/dual)
• Built-in reticle pod N2 purge function to ensure low humidity and O2 concentration inside pod environment
• Compliant with AMHS automatic load and unload
• Optical pellicle orientation detection
• Automatic identification of EUV and OPT reticle orientation (0/90/180/270, flip/non flip)
• Perform reticle rotation, flipping, and box replacement in accordance with recipe

Performance

• Reticle exchange cycle time
  
  <3 minutes
• Cleanliness
  
  0 count at particle >100nm