Wafer Sorter (KAR-211)

Features

• 2~8 Load Ports, built-in Load Port N2 Purge Subsystem
• Sort, merge, split wafers by wafer ID in accordance with recipe
• 5-axis dual fork robot without track axis, high precision and speed
• Controllable FFU wind speed and internal positive pressure. Internal flow field is simulated and designed by CFD to ensure the down flow pattern is uniform laminar flow.
• Compatible with 8“ and 12” wafers, double sided wafer ID reading
• Compliant with SECS/GEM communication protocol
• Compliant with E84 for OHT load/unload handshaking interface
• SEMI S2 certificated

Performance

• Throughput
  
  above 700 WPH
• Transfer accuracy
  
  ±0.05mm
• Cleanliness
  
  ISO Class 3
  (FS-209E Class 1)

Equipment Front-end Module (EFEM)

Features

• 2~4 load ports, built-in Load Port N2 Purge
• 5-axis dual fork robot without track axis, high precision and speed
• Controllable FFU wind speed and internal positive pressure. Internal flow field is simulated and designed by CFD to ensure the down flow pattern is uniform laminar flow.
• Compatible with 8“ and 12” wafers, double sided wafer ID reading
• Compliant with SECS/GEM communication protocol
• Compliant with E84 for OHT load/unload handshaking interface
• SEMI S2 certificated
• In addition to standard models, special orders for wet process or high temperature process (600°C) are also available

Performance

• Wafer transfer time
  
  <15 Seconds
• Transfer accuracy
  
  ±0.05mm
• Cleanliness
  
  ISO Class 3
  (FS-209E Class 1)

Coin Stack Stocker Unpacking Wafer Sorter (KAS-381)

Features

• The only N2 environment coin stack wafer box storage, unpacking and wafer sorting integrated equipment in the market
• Fully automatic dual-line unpacking and packaging, no waiting time when changing boxes
• Compatible to all types of coin stack wafer box, and capable of opening/closing the box cover automatically
• Sort and transfer wafers to corresponding FOUP by wafer ID in accordance with recipe
• Multiple smart sensors distinguish wafer, sponge and spacer
• Wafer box storage system with N2 circulation function saves consumption of N2 and enables long-time and large-volume storage of wafers

Performance

• Max storage
  
  87 coin stack wafer boxes in N2 environment (2175 wafers)
• Throughput
  
  above 180 WPH
• Cleanliness
  
  ISO Class 4
  (FS-209E Class 10)

Coin Stack Stocker Unpacking Wafer Sorter SE (KAS-382)

Features

• The only N2 environment coin stack wafer box storage, unpacking and wafer sorting integrated equipment in the market
• Fully automatic dual-line unpacking and packaging, no waiting time when changing boxes
• Compatible to all types of coin stack wafer box, and capable of opening/closing the box cover automatically
• Sort and transfer wafers to corresponding FOUP by wafer ID in accordance with recipe
• Multiple smart sensors distinguish wafer, sponge and spacer
• Minimized N2 pass windows save consumption of N2

Performance

• Max storage
  
  8 coin stack wafer boxes in 8 independent N2 pass windows
• Throughput
  
  above 180 WPH
• Cleanliness
  
  ISO Class 4
  (FS-209E Class 10)

Coin Stack Pack/Unpack Wafer Sorter (KAP-541)

Features

• The only wafer coin stack wafer box pack/unpack and wafer sorting integrated equipment in the market
• Fully automatic dual-line unpacking and packaging, no waiting time when changing boxes
• Compatible to all types of coin stack wafer box, and capable of opening/closing the box cover automatically
• Sort and transfer wafers to corresponding FOUP by wafer ID in accordance with recipe
• Compatible with 8”, 12”, normal and thinned wafers

Performance

• Throughput
  
  above 180 WPH
• Cleanliness
  
  ISO Class 4
  (FS-209E Class 10)